Method of forming a structure on a substrate

ABSTRACT

A method of forming a layer on a substrate is provided by providing the substrate with a hardmask material. The hardmask material is infiltrated with infiltration material during N infiltration cycles by:
         a) providing a first precursor to the hardmask material on the substrate in the reaction chamber for a first period T1;   b) removing a portion of the first precursor for a second period T2; and,   c) providing a second precursor to the hardmask material on the substrate for a third period T3, allowing the first and second precursor to react with each other forming the infiltration material.

FIELD OF INVENTION

The present disclosure generally relates to methods and systems for manufacturing electronic devices. More particularly, the disclosure relates to methods for forming a structure on a substrate.

BACKGROUND

As the trend has pushed semiconductor devices to smaller and smaller sizes, different patterning techniques have arisen. These techniques include spacer defined quadruple patterning, extreme ultraviolet lithography (EUV), and EUV combined with Spacer Defined Double patterning. In addition, directed self-assembly (DSA) has been considered as an option for future lithography applications. DSA involves the use of block copolymers to define patterns for self-assembly. The block copolymers used may include poly(methyl methacrylate) (PMMA), polystyrene, or poly(styrene-block-methyl methacrylate) (PS-b-PMMA). Other block copolymers may include emerging “high-Chi” polymers, which may potentially enable small dimensions.

The patterning techniques described above may utilize at least one polymer resist disposed on a substrate to enable high resolution patterning of the substrate. To satisfy the requirements of both high resolution and line-edge roughness, the polymer resist may commonly be a thin layer. However, such thin polymer resists may have several drawbacks. In particular, high resolution polymer resists may have low etch resistance. This low etch resistance makes the transfer of the patterned resist to underlying layers more difficult. The issue of low etch resistance becomes greater when the advanced high resolution polymer resists needed to further downscale the size of the semiconductor device has an even lower etch resistance and etch selectivity. In addition, the high resolution polymer resists may result in high edge roughness in the obtained patterns.

It may therefore be advantageous to transfer the pattern of the polymer resist to a hardmask. A hardmask is a material used in semiconductor processing as an etch mask instead of polymer or other organic “soft” resist materials with a higher etching resistance and etching selectivity. As a result, a hardmask system with advanced properties may be required.

SUMMARY

In accordance with at least one embodiment of the invention a method of forming a structure on a substrate is provided. The method comprising:

providing the substrate with a hardmask material in a reaction chamber; and

infiltrating the hardmask material with infiltration material during one or more infiltration cycles. The cycles may comprise:

a) providing a first precursor to the hardmask material on the substrate in the reaction chamber for a first period T1;

b) removing a portion of the first precursor for a second period T2 from the reaction chamber; and,

c) providing a second precursor to the hardmask material on the substrate for a third period T3, allowing the first and second precursor to react with each other forming the infiltration material in the hardmask material.

For purposes of summarizing the invention and the advantages achieved over the prior art, certain objects and advantages of the invention have been described herein above. Of course, it is to be understood that not necessarily all such objects or advantages may be achieved in accordance with any particular embodiment of the invention. Thus, for example, those skilled in the art will recognize that the invention may be embodied or carried out in a manner that achieves or optimizes one advantage or group of advantages as taught or suggested herein without necessarily achieving other objects or advantages as may be taught or suggested herein.

All of these embodiments are intended to be within the scope of the invention herein disclosed. These and other embodiments will become readily apparent to those skilled in the art from the following detailed description of certain embodiments having reference to the attached figures, the invention not being limited to any particular embodiment(s) disclosed.

BRIEF DESCRIPTION OF THE FIGURES

These and other features, aspects, and advantages of the invention disclosed herein are described below with reference to the drawings of certain embodiments, which are intended to illustrate and not to limit the invention.

FIG. 1 is a flowchart in accordance with at least one embodiment of the invention.

FIG. 2 illustrates an exemplary system in accordance with various exemplary embodiments of the disclosure.

FIG. 3 illustrates an additional exemplary system in accordance with various exemplary embodiments of the disclosure.

It will be appreciated that elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to help improve understanding of illustrated embodiments of the present disclosure.

DETAILED DESCRIPTION

Although certain embodiments and examples are disclosed below, it will be understood by those in the art that the invention extends beyond the specifically disclosed embodiments and/or uses of the invention and obvious modifications and equivalents thereof. Thus, it is intended that the scope of the invention disclosed should not be limited by the particular disclosed embodiments described below.

Embodiments in accordance with the invention relate to the combination of hard masks with a film infiltration processes. This combination of a hardmask and infiltration processes can alter the properties (e.g. etch rate or even LER of width of patterned features) of the hardmask significantly.

FIG. 1 illustrates a method 100 in accordance with at least one embodiment of the invention. The method 100 includes a first step 110 of providing a substrate into a reaction chamber, the substrate having at least one hardmask material on top of the substrate.

The hard mask material may be porous. Porosity may be measured by measuring the void spaces in the hard mask material as a fraction of the total volume of the hard mask material and may have a value between 0 and 1. The hardmask material may be qualified as porous if the fraction of void spaces over the total volume is larger than 0.1, larger than 0.2 or even larger than 0.3.

The hardmask material may, for example, comprise a spin on glass or spin on carbon layer, a silicon nitride layer, an anti-reflective-coating or an amorphous carbon film. The spin on glass or spin on carbon layer may be provided by spinning a glass or carbon layer on the substrate to provide the hardmask material. Further, the hardmask material may comprise SiCOH, or SiOC.

In an embodiment a patterned layer may be provided above the hardmask material and a pattern of the patterned layer may be etched in the hardmask material creating a patterned hardmask. Subsequently, the patterned layer may be removed and the patterned hardmask may be used for further processing. This may alleviate the issue that a high resolution hardmask material may have a low etch resistance by applying a hardmask that is more etch resistant. The hardmask may be further processed to improve the line edge roughness or the line width of the patterned hardmask. There may be an intermediate layer between the hardmask and the patterned layer.

In an embodiment the patterned layer may be provided on the hardmask material by providing a resist (e.g. an photo resist) layer on top of the hardmask material; and, patterning the resist layer with a (optical) lithographic apparatus. The photo resist layer may have a low etch resistance and by transferring the pattern in the resist layer to the hardmask the etch resistance of the pattern may be improved.

The resist layer may be annealed. The anneal step may have a purpose of degassing moisture or other contaminants from the resist, hardening the resist, or selectively burning away portions of the resist from the substrate surface.

In an embodiment, the patterned layer on top of the hardmask material may be provided by having a block copolymer film above the hardmask material and promoting directed self assembly of the block copolymer film to form the patterned layer. The block copolymer film may have a low etch resistance and by transferring the pattern in the copolymer to the hardmask the etch resistance of the pattern may be improved. An intermediate patterned layer may be provided between the hardmask material and the block copolymer layer if needed for directing the block copolymer film.

In embodiments in which a self-assembly anneal of the block copolymer film is performed in order to reach a low defect density in the obtained pattern, process parameters, such as the time, temperature, and the ambient conditions and pressure of the annealing process, are critical. A long annealing time may be needed to obtain a low defect density. The anneal may take place at a temperature ranging between 100 and 400° C., preferably between 200 and 300° C., and most preferably 250° C., for about 60 minutes. Other temperatures and periods are possible depending on the amount of anneal desired. However, the temperature of the self-assembly anneal should not be increased too high or the polymers may start to decompose.

The ambient environment in which the annealing is done may comprise nitrogen, argon, helium, hydrogen, oxygen, ozone, water vapor, solvent vapors, or mixtures of these gases. The pressure of the anneal ambient environment can be any pressure in the range from ultra-high vacuum to atmospheric pressure or even above atmospheric pressure.

In accordance with one embodiment of the invention, the annealing process may take place on a single wafer hot plate. In accordance with another embodiment of the invention, a batch reactor may prove to be beneficial for processes needing a long anneal time. The batch reactor may hold between 2 and 250 substrates, preferably between 5 and 150 substrates, or most preferably about 100 substrates. For example, a cluster tool comprising two or more reaction chambers may be operated such that one reaction chamber, preferably a batch reactor may be used for an anneal process. This may enable the process to perform long anneals on the order of 1-2 hours in a cost effective way.

The method 100 may comprise a second step 120 in which the hardmask material may be infiltrated with an infiltration material during one or more infiltration cycles. Each infiltration cycle may comprise the following steps:

Step 120 a of providing a first precursor to the hardmask material on the substrate in the reaction chamber for a first period T1;

Step 120 b of removing a portion of the first precursor for a second period T2; and,

Step 120 c of providing a second precursor to the hardmask material on the substrate for a third period T3, allowing the first and second precursor to react with each other forming the infiltration material, resulting in a reinforcement of the hardmask material.

Optionally the infiltration cycle may have a step 120 d in which a portion of the second precursor may be removed for a fourth period T4. The infiltration sequence may be repeated N times, wherein N is between 1 to 60, preferably 3 to 20 and most preferably between 5 to 12. The infiltration 120 may be done such that precursors forming a metal or dielectric may infiltrate the hard mask material. The precursors are preferably gases during the infiltration.

Optionally, the infiltration material such as a metal or dielectric may be deposed on the whole volume of the hard mask as well. This may, for example, be done if the hard mask is patterned to make the pattern wider and more etch resistant.

It also becomes possible to infiltrate/deposit a self-aligned double patterning mask layer on top of the hard mask as well. After removal of the original hard mask layer the double patterning mask layer may be used for further pattern transfer.

Removing the first and/or second precursor may be accomplished by pumping the first or second precursor out of the reaction chamber and alternatively or additionally by providing a purge gas in the reaction chamber to purge the first and/or second precursor away.

The first precursor may be provided for the first period T1 between 1 to 20000, preferably between 20 to 6000, more preferably between 50 and 4000, and most preferably between 100 and 2000 seconds in step 120 a. In this way a deep infiltration of the first precursor in the hard mask material is assured.

In step 120 b a portion of the first precursor may be removed for a second period T2 between 1 to 20000, preferably between 20 to 6000, more preferably between 50 and 4000, and most preferably between 100 and 2000.

The method in step 120 may be by performed in a deposition/infiltration system 200 (FIG. 2), 300 (FIG. 3). The deposition system may be a diffusion oven, a chemical vapor deposition system, an atomic layer deposition system or a dedicated sequential infiltration synthesis system. The method may comprise heating the reactor chamber to a temperature between 20 and 450° C., preferably between 50 and 150° C., more preferably between 60 and 110° C. and most preferably between 65 and 95° C.

Turning now to FIG. 2, the system 200 for infiltration of at least a portion of the hardmask material is illustrated. System 200 may comprise a reactor 202 which may further comprise a first reaction chamber 203, a substrate holder 204, and a gas distribution system 206. The system 200 may also comprise a gas precursor delivery system 201 which may further comprise first precursor source 207; a second precursor source 208; a carrier or purge gas source 210; and valves 211, 212 and 214 interposed between the sources 207, 208, 210, 216 and reactor 202.

Reaction chamber 203 may be a standalone reaction chamber or part of a cluster tool. Further, reaction chamber 203 may be dedicated to an infiltration process as described herein, or reaction chamber 203 may be used for other processes, e.g., for film deposition, removing a portion of at least one polymer layer and one or more additional layer deposition and/or etch processing. For example, reaction chamber 203 may comprise a reaction chamber typically used for chemical vapor deposition (CVD) and/or atomic layer deposition (ALD) processing, and may also comprise direct plasma, and/or remote plasma apparatus.

Further reaction chamber 203 may operate under a vacuum or near atmospheric pressure. By way of one example, reaction chamber 203 may comprise a reaction chamber suitable for ALD deposition of a film by sequentially pulsing the first precursor and the second precursor onto at least one substrate, the film being configured to enable infiltration of at least the first precursor into the hard mask material. An exemplary ALD reaction chamber suitable for system 200 is described in U.S. Pat. No. 8,152,922, the contents of which are hereby incorporated herein by reference, to the extent such contents do not conflict with the present disclosure.

Substrate holder 204 may be configured to hold at least one substrate, such as substrate 216, having a hard mask layer disposed thereon, in place during processing. Additionally or alternatively, the substrate holder 204 may be heated (e.g., by heating element 205), cooled, or be at ambient process temperature during processing. In some embodiments, heating element 205 may be configured to perform an annealing step on the at least one substrate 216.

Although gas distribution system 206 is illustrated in block form, the gas distribution system 206 may be relatively complex and designed to mix vapor (gas) from first precursor source 207, second precursor source 208 and purge gas from gas source 210, prior to distributing the gas mixture to the remainder of reaction chamber 203. Further, gas distribution system 206 may be configured to provide vertical (as illustrated) or horizontal flow of gases to the semiconductor surface. An exemplary gas distribution system is described in U.S. Pat. No. 8,152,922.

First precursor source 207 may be a liquid, solid, or gas source of metal containing material suitable in an infiltration process. If first precursor source 207 is liquid or solid, the source material may be vaporized prior to entering the reaction chamber 203.

Second precursor source 208 may be a liquid, solid, or gas source containing material suitable in an infiltration process. If second precursor source 208 is liquid or solid, the source material may be vaporized prior to entering the reaction chamber 203.

The first precursor and the second precursor may be utilized together to deposit and/or infiltrate the hardmask. For example, in some embodiments, the system 200 may be configured to deposit and/or infiltrate aluminum oxide (Al2O3), silicon oxide, (SiO2), silicon nitride (SiN), silicon oxynitride (SiON), silicon carbonitride (SiCN), silicon carbide (SiC), titanium carbide (TiC), aluminum nitride (AlN), titanium nitride (TiN), tantalum nitride (TaN), tungsten (W), cobalt (Co), titanium oxide (TiO2), tantalum oxide (Ta2O5), zirconium oxide (ZrO2), or hafnium oxide (HfO2) on and/or in the hardmask.

Purge gas source 210 may include any suitable gas suitable for purging the first precursor source 207 and/or the second precursor source 208. Carrier or purge gas source 210 may also include any gas suitable for purging reaction chamber 203 before, after or during the deposition and/or infiltration process. In accordance with exemplary embodiments of the disclosure, a purge gas may be nitrogen, argon, helium, or a combination thereof.

As illustrated in FIG. 2, sources 207, 208, and 210 are in fluid communication with reaction chamber 203 via valves 211, 212, and 214, which may be used to control the flow, mixing and distribution of the respective source materials to reaction chamber 203 using the supply lines 219, 220, and 222.

In additional embodiments of the disclosure, a system 300 for depositing and/or infiltrating a hardmask is illustrated with reference to FIG. 3. The system 300 may be similar to that of system 200 but may comprise a reactor 302 which may further comprise a first reaction chamber 203A and a second reaction chamber 203B. Although FIG. 3 illustrates a reactor 302 comprising two reaction chambers it should be appreciated that in some embodiments the reactor 302 may comprise a plurality of reaction chambers, wherein each reaction chamber comprises a substrate holder 204, and a gas distribution system 206, as previously described herein. The substrate holder maybe constructed for holding a single substrate, 2 to 25 substrate (mini batch) or 26 to 200 substrates (full batch). The system 300 may also comprise a first precursor source 207, a second precursor source 208, a carrier or purge gas source 210, and valves 211, 212, and 214 interposed between the sources 207, 208, 210 and the reactor 302.

The system 300 may also comprise a transfer system 304 utilized for transferring a substrate, e.g. a semiconductor, from the first reaction chamber 203A and the second reaction chamber 203B to outside the system. In some embodiments, reaction chambers 203A and 203 B may be dedicated to the infiltration process as described herein, or reaction chambers 203A and 203B may be used for other processes, e.g., for layer deposition and/or etch process also. For example, reaction chambers 203A and 203B may comprise reaction chambers typically used for chemical vapor deposition (CVD), infiltration and/or atomic layer deposition processes, as described herein. In additional embodiments, the system 300 may comprise additional reaction chambers for performing additional dedicated processes such as deposition and etch process.

As illustrated in FIG. 3, sources 207 and 208 are in fluid communication with reactor 302 via valves 211, and 212, which may be used to control the flow, mixing and distribution of the respective source materials to reactor chambers 203A and 203B using the supply lines 219, and 220 all part of the common precursor delivery system 201. The method comprising providing a substrate to each reaction chamber and providing the first and/or second precursor to the at least two reaction chambers with a common precursor delivery system 201.

The system may comprise a common precursor removal system 226 (e.g. a vacuum pump). The method may further comprise removing the first or second precursor from the at least two reaction chambers with the common removal system 226.

The system may comprise a common purge system 210, 214, 222. The method may comprise removing the first or second precursor from the at least two reaction chambers by providing a purge gas with the common purge system.

In an embodiment the reaction chamber of the system 200 in FIG. 2 is constructed and arranged to accommodate a single substrate 21 in FIG. 1 and the first precursor may be provided for the first period T1 between 1 to 20000, preferably between 20 to 4000, more preferably between 30 and 1000 seconds.

In a further embodiment the reaction chamber of the system is constructed and arranged to accommodate 2 to 25 substrates and the first precursor may be provided for the period T1 between 1 to 16000, preferably between 20 and 7000 and most preferably between 30 and 1500 seconds.

In another embodiment the reaction chamber is constructed and arranged to accommodate 26 to 200 substrates and the first precursor may be provided for the period T1 between 1 to 20000, preferably between 100 to 10000, more preferably between 200 and 6000 and most preferably between 300 and 4000 seconds.

Before infiltrating the patterned hardmask material with infiltration material it may be advantageous to purge the reaction chamber(s) for 1 to 3000 seconds, preferably 120 to 1200 seconds at a temperature between 20 and 600° C., preferably 50 and 150° C. and most preferably 70 and 100° C. to enhance outgassing.

The first precursor may be provided with a bubbler for the first period T1 in step 120 a, which provides a non-continuous first precursor flow having pulses of the first precursor mixed with purge gas for 0.1 to 100, preferably 1 to 3 seconds alternating with pulses of a purge gas for 0.1 to 20, preferably 0.3 to 1 seconds.

The first precursor may be heated before providing the precursor to the reaction chamber to a temperature between room temperature and the boiling temperature at the reaction chamber pressure preferably between 20 and 450° C., more preferably between 30 and 80° C. and even more preferably between 35 and 60° C.

The infiltration system may be provided with a temperature control system comprising a controller, a heater and a temperature sensor to control the temperature in the reaction chamber to a temperature between 20 and 450 C.°, preferably between 50 and 150 C.°, more preferably between 60 and 110 C.° and most preferably between 65 and 95 C.°. The reactor chamber(s) may be heated to a temperature between 20 and 450 C.°, preferably between 50 and 150 C.°, more preferably between 60 and 110 C.° and most preferably between 65 and 95 C.°. All surfaces in the reactor chamber(s), exhaust line(s) and valves may be heated to between 20 and 450 C.°, preferably between 50 and 150 C.°, more preferably between 60 and 110 C.° and most preferably between 65 and 95 C.° to avoid condensation of at least one of the precursors in the system.

The deposition system may be provided with a pressure control system comprising a controller, a pump and a purge gas or first precursor supply to control the pressure in the reaction chamber. The pressure in the chamber may be controlled to a value between 0.001 and 1000 Torr, preferably between 1 and 400 Torr, more preferably between 5 and 100 Torr and most preferably between 10 and 50 Torr.

The infiltration material may comprises a metal. The first precursor may be an alkyl compound of aluminum selected from the group consisting of trimethyl aluminum (TMA), triethyl aluminum (TEA), and dimethylaluminumhydride (DMAH) and the infiltration material comprises aluminum as the metal.

The first or second precursor may comprise titanium(IV)chloride (TiCl4), tantalum(V)chloride (TaCl5), niobium chloride (NbCl5). The second precursor may be an oxidant. The oxidant is chosen form the group comprising water, ozone, hydrogenperoxide, ammonia and hydrazine.

For infiltrating zirconium or hafnium the Zr or Hf precursor may comprise metalorganic, organometallic or halide precursor. In some embodiments the precursor is a halide. In some other embodiments the precursor is alkylamine compound of Hf or Zr, such as TEMAZ or TEMAH.

The metal or dielectric deposited in the second step 120 may comprise aluminum oxide (Al2O3), silicon oxide (SiO2), silicon nitride (SiN), silicon oxycarbide (SiOC), silicon carbonitride (SiCN), silicon carbide (SiC), aluminum nitride (AlN), titanium nitride (TiN), titanium carbide (TiC), tantalum nitride (TaN), tungsten (W), cobalt (Co), titanium oxide (TiO2), tantalum oxide (Ta2O5), zirconium oxide (ZrO2), or hafnium oxide (HfO2).

In order to perform the selective deposition, precursors to obtain the metal may be used, such as trimethylaluminum (TMA) and water (H2O) for the formation of aluminum oxide (Al2O3, AlO). The infiltration and/or deposition in the second step 120 may take place at a temperature ranging between 20 and 300° C., with a preferable temperature range of 65−95° C. for the formation of aluminum oxide. The temperature during the second step 120 may be less than the temperature during the a previous stage, so a cool down step may be needed to go from an example annealing or outgassing temperature of 250° C. to a second step 130 temperature of 70 to 100° C. A temperature of the optional annealing or outgassing process may be at least 25° C. higher than that of the second step 120, preferably between 25-300° C. higher than that of the second step 120, or more preferably between 100-250° C. higher than that of the second step 120.

The step 120 a may comprise a supply of a first precursor, such as TMA, for a period T1 ranging from 1 seconds to 20000 seconds preferably between 20 to 6000, more preferably between 50 and 4000, and most preferably between 100 and 2000 seconds. The step 120 b may also then comprise a removal and/or a purge for the second period T2 between 1 seconds to 20000 seconds preferably between 20 to 6000, more preferably between 50 and 4000, and most preferably between 100 and 2000 seconds.

The step 120 c may then comprise a supply of a second precursor, such as water, for a period T3 ranging from 1 to 10000 seconds, preferably 6 to 800 seconds, more preferably 10 to 100 seconds. The second step 120 d may then comprise a second removal/purge having a fourth period T4 ranging from 1 to 10000 seconds, preferably 6 to 800 seconds.

In addition, the second step 120 may be repeated as needed in order to obtain sufficient infiltration of the metal or dielectric.

In accordance with at least one embodiment of the invention, the second step 120 of infiltration may precede the optional step of annealing. In this case, the metal or dielectric film may first infiltrate the hardmask material, and then an annealing process may occur. In at least one embodiment of the invention, the optional annealing step and the second step 120 of infiltration take place without any exposure to ambient air. The lack of exposure to ambient air avoids exposure to substantial amounts of oxygen or water. Exposure to ambient air may adversely affect the infiltration of the hard mask material, which may be affected by potentially absorbing water. If the hardmask material absorbs water, deposition of undesired material may result.

In accordance with an embodiment the infiltration material comprises a metal carbide produced by the first precursor being a metal halide preferable from the group consisting of titanium(IV)chloride (TiCl4), tantalum(V)chloride (TaCl5), and niobium chloride (NbCl5) and the second precursor being an aluminum or boron hydrocarbon compound preferably selected from the group consisting of trimethyl aluminum (TMA), triethyl aluminum (TEA), and dimethylaluminumhydride (DMAH) dimethylethylaminealane (DMEAA), trimethylaminealane (TEAA), N-methylpyrroridinealane (MPA), tri-isobutylaluminum (TIBA), tritertbutylaluminum (TTBA) trimethylboron and triethylboron.

The particular implementations shown and described are illustrative of the invention and its best mode and are not intended to otherwise limit the scope of the aspects and implementations in any way. Indeed, for the sake of brevity, conventional manufacturing, connection, preparation, and other functional aspects of the system may not be described in detail. Furthermore, the connecting lines shown in the various figures are intended to represent exemplary functional relationships and/or physical couplings between the various elements. Many alternative or additional functional relationship or physical connections may be present in the practical system, and/or may be absent in some embodiments.

It is to be understood that the configurations and/or approaches described herein are exemplary in nature, and that these specific embodiments or examples are not to be considered in a limiting sense, because numerous variations are possible. The specific routines or methods described herein may represent one or more of any number of processing strategies. Thus, the various acts illustrated may be performed in the sequence illustrated, in other sequences, or omitted in some cases.

The subject matter of the present disclosure includes all novel and nonobvious combinations and subcombinations of the various processes, systems, and configurations, and other features, functions, acts, and/or properties disclosed herein, as well as any and all equivalents thereof. 

What is claimed is:
 1. A method of forming a structure on a substrate comprising: providing the substrate with a hardmask material in a reaction chamber; and infiltrating the hardmask material with infiltration material during one or more infiltration cycles comprising: a) providing a first precursor to the hardmask material on the substrate in the reaction chamber for a first period T1; b) removing a portion of the first precursor for a second period T2 from the reaction chamber; and, c) providing a second precursor to the hardmask material on the substrate for a third period T3, allowing the first and second precursor to react with each other forming the infiltration material in the hardmask material.
 2. The method according to claim 1, wherein the method comprises: providing a patterned layer above the hardmask material; and, etching a pattern of the patterned layer in the hardmask material creating a patterned hardmask.
 3. The method according to claim 2, wherein providing the patterned layer above the hardmask material comprises: providing a photoresist layer on the hardmask material; and, patterning the photoresist layer with a lithographic apparatus.
 4. The method according to claim 2, wherein providing a patterned layer above the hardmask material comprises: providing a block copolymer film on the hardmask material; and, promoting directed self assembly of the block copolymer film to form the patterned layer.
 5. The method according to claim 1, wherein the one or more infiltration cycles comprise: d) removing a portion of the second precursor for a fourth period T4; and the one or more infiltration cycles are between 1 to 60 infiltration cycles.
 6. The method according to claim 1, wherein the mask material is porous.
 7. The method according to claim 1, wherein the hardmask material comprises a spin on glass or spin on carbon layer.
 8. The method according to claim 1, wherein the hardmask material comprises a silicon nitride layer.
 9. The method according to claim 1, wherein the hardmask material comprises an anti reflective-coating.
 10. The method according to claim 1, wherein the hardmask material comprises an amorphous carbon, SiCOH, or SiOC material.
 11. The method according to claim 1, wherein removing the first and/or second precursor comprises pumping the first or second precursor out of the reaction chamber.
 12. The method according to claim 1, wherein removing the first and/or second precursor comprises providing a purge gas in the reaction chamber to purge the first and/or second precursor away.
 13. The method according to claim 1, wherein the method comprises: providing a sequential infiltration synthesis apparatus comprising at least two reaction chambers each chamber constructed and arranged to accommodate a single substrate; providing a substrate to each reaction chamber; providing the first and/or second precursor to the at least two reaction chambers with a common precursor delivery system.
 14. The method according to claim 1, wherein before infiltrating the hard mask material with infiltration material during N infiltration cycles the reaction chamber is purged for 1 to 3000 seconds at a temperature between 20 and 600° C.
 15. The method according to claim 1, wherein the method comprises heating the reactor chamber to a temperature between 20 and 450° C.
 16. The method according to claim 1, wherein the method comprises: heating all surfaces in the reactor chamber, exhaust line and valves to between 20 and 450° C.
 17. The method according to claim 1, wherein the pressure in the chamber is between 0.001 and 1000 Torr.
 18. The method according to claim 1, wherein the infiltration material comprises a metal.
 19. The method according to claim 18, wherein the first or second precursor is an alkyl compound of aluminum selected from the group consisting of trimethyl aluminum (TMA), triethyl aluminum (TEA), and dimethylaluminumhydride (DMAH) and the infiltration material comprises aluminum as the metal.
 20. The method according to claim 18, wherein the first or second precursor comprises titanium(IV)chloride (TiCl4), tantalum(V)chloride (TaCl5), niobium chloride (NbCl5).
 21. The method according to claim 1, wherein the first or second precursor is an oxidant selected from the group comprising water, ozone, or hydrogen peroxide, or a nitridizer selected from the group comprising ammonia and hydrazine.
 22. The method according to claim 18, wherein the infiltration material comprises a metal carbide produced by one of the first and second precursor comprising a metal halide preferable from the group consisting of titanium(IV)chloride (TiCl4), tantalum(V)chloride (TaCl5), and niobium chloride (NbCl5) and the other one of the first and second precursor comprising an aluminum or boron hydrocarbon compound preferably selected from the group consisting of trimethyl aluminum (TMA), triethyl aluminum (TEA), and dimethylaluminumhydride (DMAH) dimethylethylaminealane (DMEAA), trimethylaminealane (TEAA), N-methylpyrroridinealane (MPA), tri-isobutylaluminum (TIBA), tritertbutylaluminum (TTBA) trimethylboron and triethylboron.
 23. The method according to claim 1 wherein the hard mask material is patterned. 